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Planar Concern

Business category 1 Laser Equipment
City ( of main office ) Minsk, BY, Belarus
Address 2 Partyzanski Ave.
Phones 375-17-2232226
Fax 375-17-2237211
Web site planar.by
About Development and production of special photolithography, inspection and measurement equipment:

Photolithography, inspection and measurement equipment for the microelectronic industry:

For mask fabrication (masks for ICs, printed circuit boards, LCDs, TV shadow masks) :

single-channel, multi-channel and large-area laser pattern generators;

photo repeaters;

laser mask repair systems.

For photolithography:

steppers (wafer steppers, LCD steppers and PCB steppers) ;

mask aligners (contact / proximity exposure, top-to-bottom side alignment) ;

Inspection and measurement equipment:

flatness inspection systems for wafers, masks, LCDs;

defect inspection systems for wafers, masks, LCD masks;

critical dimensions inspection systems for wafers, masks;

coordinate measurement systems;

Laser Pattern Generators since 1983

Multi-Beam Laser Pattern Generator EM-5089 since 1984
Date 2011 Oct 28, 23:10